JPH081468Y2 - 差圧測定装置 - Google Patents
差圧測定装置Info
- Publication number
- JPH081468Y2 JPH081468Y2 JP1990062885U JP6288590U JPH081468Y2 JP H081468 Y2 JPH081468 Y2 JP H081468Y2 JP 1990062885 U JP1990062885 U JP 1990062885U JP 6288590 U JP6288590 U JP 6288590U JP H081468 Y2 JPH081468 Y2 JP H081468Y2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- pressure
- housing
- center
- pressure side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 24
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 239000010703 silicon Substances 0.000 claims description 24
- 239000007788 liquid Substances 0.000 claims description 19
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990062885U JPH081468Y2 (ja) | 1990-06-14 | 1990-06-14 | 差圧測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990062885U JPH081468Y2 (ja) | 1990-06-14 | 1990-06-14 | 差圧測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0421939U JPH0421939U (en]) | 1992-02-24 |
| JPH081468Y2 true JPH081468Y2 (ja) | 1996-01-17 |
Family
ID=31592440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990062885U Expired - Lifetime JPH081468Y2 (ja) | 1990-06-14 | 1990-06-14 | 差圧測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081468Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023029645A (ja) * | 2019-02-27 | 2023-03-03 | キストラー ホールディング アクチエンゲゼルシャフト | センサ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7021020B2 (ja) * | 2018-07-24 | 2022-02-16 | アズビル株式会社 | 圧力センサチップ |
-
1990
- 1990-06-14 JP JP1990062885U patent/JPH081468Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023029645A (ja) * | 2019-02-27 | 2023-03-03 | キストラー ホールディング アクチエンゲゼルシャフト | センサ |
| US12235175B2 (en) | 2019-02-27 | 2025-02-25 | Kistler Holding Ag | Sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0421939U (en]) | 1992-02-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |